4

Measurements of residual stress in the thin film micro-gas sensors containing metallic layers

Year:
2001
Language:
english
File:
PDF, 906 KB
english, 2001
12

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

Year:
2000
Language:
english
File:
PDF, 79 KB
english, 2000